| 5902407 |
Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment |
Albert E. Ozias |
1999-05-11 |
| 5435682 |
Chemical vapor desposition system |
Richard Crabb, McDonald Robinson, Mark Hawkins, Dennis L. Goodwin, Armand P. Ferro +1 more |
1995-07-25 |
| 5427620 |
Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment |
Albert E. Ozias |
1995-06-27 |
| 5374315 |
Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment |
Albert E. Ozias |
1994-12-20 |
| 5318634 |
Substrate supporting apparatus |
Albert E. Ozias |
1994-06-07 |
| 5198034 |
Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment |
Albert E. Ozias |
1993-03-30 |
| 5117769 |
Drive shaft apparatus for a susceptor |
Albert E. Ozias |
1992-06-02 |
| 5092728 |
Substrate loading apparatus for a CVD process |
Richard Crabb, McDonald Robinson, Mark Hawkins, Dennis L. Goodwin, Armand P. Ferro +1 more |
1992-03-03 |
| 4996942 |
Rotatable substrate supporting susceptor with temperature sensors |
Albert E. Ozias |
1991-03-05 |
| 4993355 |
Susceptor with temperature sensing device |
Albert E. Ozias |
1991-02-19 |
| 4828224 |
Chemical vapor deposition system |
Richard Crabb, McDonald Robinson, Mark Hawkins, Dennis L. Goodwin, Armand P. Ferro +1 more |
1989-05-09 |
| 4821674 |
Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment |
Albert E. Ozias |
1989-04-18 |
| 4798165 |
Apparatus for chemical vapor deposition using an axially symmetric gas flow |
Klavs F. Jensen, Wayne Johnson, Gary W. Read, McDonald Robinson |
1989-01-17 |
| 4789771 |
Method and apparatus for substrate heating in an axially symmetric epitaxial deposition apparatus |
McDonald Robinson, Ronald D. Behee, Wayne Johnson |
1988-12-06 |
| 4654509 |
Method and apparatus for substrate heating in an axially symmetric epitaxial deposition apparatus |
McDonald Robinson, Ronald D. Behee, Wayne Johnson |
1987-03-31 |