Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6207333 | Mask with attenuating phase-shift and opaque regions | James J. Colelli, Erik Puttlitz, Timothy J. Toth, Arthur C. Winslow | 2001-03-27 |
| 6184151 | Method for forming cornered images on a substrate and photomask formed thereby | Richard A. Ferguson, Mark C. Hakey, Steven J. Holmes, David V. Horak, Robert K. Leidy +3 more | 2001-02-06 |
| 6165651 | Apparatus for tuning an attenuating phase shift mask | David S. O'Grady, Song Peng | 2000-12-26 |
| 6027837 | Method for tuning an attenuating phase shift mask | David S. O'Grady, Song Peng | 2000-02-22 |
| 5959325 | Method for forming cornered images on a substrate and photomask formed thereby | Richard A. Ferguson, Mark C. Hakey, Steven J. Holmes, David V. Horak, Robert K. Leidy +3 more | 1999-09-28 |
| 5807649 | Lithographic patterning method and mask set therefor with light field trim mask | Lars Liebmann, David S. O'Grady, Richard A. Ferguson | 1998-09-15 |
| 5532089 | Simplified fabrication methods for rim phase-shift masks | Timothy A. Brunner, Derek B. Dove, Louis L. Hsu, Chi-Min Yuan | 1996-07-02 |
| 5506080 | Lithographic mask repair and fabrication method | David S. O'Grady, Willam C. Joyce, James J. Lynch, Jean T. Ohlson | 1996-04-09 |