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Modular semiconductor workpiece processing tool |
Robert W. Berner, Daniel J. Woodruff, Wayne J. Schmidt, Kevin W. Coyle, Worm Lund |
2006-07-11 |
| 6869510 |
Methods and apparatus for processing the surface of a microelectronic workpiece |
Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen |
2005-03-22 |
| 6805185 |
Cover panel attachment system for partitions |
Donald P. Gravel, Douglas L. Hancey |
2004-10-19 |
| 6699373 |
Apparatus for processing the surface of a microelectronic workpiece |
Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen |
2004-03-02 |
| 6654122 |
Semiconductor processing apparatus having lift and tilt mechanism |
Kyle M. Hanson, Mark Dix, Daniel J. Woodruff |
2003-11-25 |
| 6645356 |
Methods and apparatus for processing the surface of a microelectronic workpiece |
Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen |
2003-11-11 |
| 6440178 |
Modular semiconductor workpiece processing tool |
Robert W. Berner, Daniel J. Woodruff, Wayne J. Schmidt, Kevin W. Coyle, Worm Lund |
2002-08-27 |
| 6309520 |
Methods and apparatus for processing the surface of a microelectronic workpiece |
Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen |
2001-10-30 |
| 6309524 |
Methods and apparatus for processing the surface of a microelectronic workpiece |
Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen |
2001-10-30 |
| 6303010 |
Methods and apparatus for processing the surface of a microelectronic workpiece |
Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen |
2001-10-16 |
| 6203582 |
Modular semiconductor workpiece processing tool |
Robert W. Berner, Daniel J. Woodruff, Wayne J. Schmidt, Kevin W. Coyle, Worm Lund |
2001-03-20 |
| 6091498 |
Semiconductor processing apparatus having lift and tilt mechanism |
Kyle M. Hanson, Mark Dix, Daniel J. Woodruff |
2000-07-18 |
| 5731678 |
Processing head for semiconductor processing machines |
Robert W. Berner, Daniel J. Woodruff |
1998-03-24 |