Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837107 | Method and apparatus for contactlessly advancing substrates | Ernst Hendrik August Granneman | 2020-11-17 |
| 9822447 | Dynamic fluid valve and method for establishing the same | Pieter Tak | 2017-11-21 |
| 9478449 | Floating substrate monitoring and control device, and method for the same | Pascal Vermont, Wilhelmus Gerardus Van Velzen, Ernst Hendrik August Granneman, Gonzalo Felipe Ramirez Troxler | 2016-10-25 |
| 8118941 | Semiconductor processing parts having apertures with deposited coatings and methods for forming the same | — | 2012-02-21 |
| 8034410 | Protective inserts to line holes in parts for semiconductor process equipment | Ernst H. A. Granneman | 2011-10-11 |
| 8002463 | Method and device for determining the temperature of a substrate | Ernst H. A. Granneman, Pascal Vermont | 2011-08-23 |
| 7807222 | Semiconductor processing parts having apertures with deposited coatings and methods for forming the same | — | 2010-10-05 |
| 7691750 | Methods of forming films in semiconductor devices with solid state reactants | Ernest H. A. Granneman, Xavier Pages, Cornelius A. van der Jeugd | 2010-04-06 |
| 7651873 | Method relating to the accurate positioning of a semiconductor wafer | — | 2010-01-26 |
| 7427329 | Temperature control for single substrate semiconductor processing reactor | Ernst H. A. Granneman | 2008-09-23 |
| 7410355 | Method for the heat treatment of substrates | Ernst Hendrik August Granneman, Xavier Pages, Pascal Vermont, Herbert Terhorst, Gert-Jan Snijders | 2008-08-12 |
| 7351293 | Method and device for rotating a wafer | Sijbrand Radelaar, Jacobus Cornells Gerardus Van Der Sanden, Theo Anjes Maria Ruijl | 2008-04-01 |
| 7153772 | Methods of forming silicide films in semiconductor devices | Ernst H. A. Granneman, Xavier Pages, Cornelius A. van der Jeugd | 2006-12-26 |
| 7048488 | Apparatus for transferring wafer and ring | Theodorus Gerardus Maria Oosterlaken, Christianus Gerardus Maria Ridder, Ernst Hendrik August Granneman | 2006-05-23 |
| 7022627 | Method for the heat treatment of substrates | Ernst Hendrik August Granneman, Xavier Pages, Pascal Vermont | 2006-04-04 |
| 6964751 | Method and device for heat treating substrates | Arjen Storm, Ronald Bast, Jan Zinger | 2005-11-15 |
| 6877250 | Apparatus, method and system for the treatment of a wafer | Ernst Hendrik August Granneman, Gert-Jan Snijders | 2005-04-12 |
| 6843201 | Temperature control for single substrate semiconductor processing reactor | Ruud Grisel, Ernst Hendrik August Granneman | 2005-01-18 |
| 6824619 | Method and device for rotating a wafer | Sijbrand Radelaar, Jacobus Cornells Gerardus Van Der Sanden, Theo Anjes Maria Ruijl | 2004-11-30 |
| 6770851 | Method and apparatus for the treatment of substrates | Ernst Hendrik August Granneman, Arjen Storm, Herbert Terhorst | 2004-08-03 |
| 6746237 | Method and device for heat treating substrates | Arjen Storm, Ronald Bast, Jan Zinger | 2004-06-08 |
| 6719499 | Device for positioning a wafer | Sijbrand Radelaar, Jacobus Cornelis Gerardus Van Der Sanden, Theo Anjes Maria Ruijl | 2004-04-13 |
| 6560896 | Apparatus, method and system for the treatment of a wafer | Ernst Hendrik August Granneman, Gert-Jan Snijders | 2003-05-13 |
| 6561798 | Apparatus for processing a wafer | Bartholomeus Hans Louis Lindeboom, Ronald Bast, Christianus Gerardus M. de Ridder | 2003-05-13 |
| 6551404 | Apparatus for treating a wafer | Gert-Jan Snijders, Christianus Gerardus Maria De Ridder, Herbert Terhorst | 2003-04-22 |