Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515782 | Atomic layer etching with pulsed plasmas | Demetre J. Economou | 2019-12-24 |
| 10207469 | Systems and methods for rapidly fabricating nanopatterns in a parallel fashion over large areas | Demetre J. Economou, Siyuan Tian | 2019-02-19 |
| 8968588 | Low electron temperature microwave surface-wave plasma (SWP) processing method and apparatus | Jianping Zhao, Lee Chen, Demetre J. Economou, Merritt Funk, Radha Sundararajan | 2015-03-03 |
| 8030620 | System and method for nano-pantography | Demetre J. Economou, Paul Ruchhoeft, Lin Xu, Sri Charan Vemula, Manish Jain | 2011-10-04 |
| 7883839 | Method and apparatus for nano-pantography | Demetre J. Economou, Paul Ruchhoeft, Lin Xu, Sri Charan Vemula, Manish Jain | 2011-02-08 |
| 7638759 | Hyperthermal neutral beam source and method of operating | Demetre J. Economou, Lee Chen | 2009-12-29 |
| 7358484 | Hyperthermal neutral beam source and method of operating | Demetre J. Economou, Lee Chen | 2008-04-15 |
| 6511872 | Device having a high dielectric constant material and a method of manufacture thereof | Avinoam Kornblit, Kalman Pelhos | 2003-01-28 |
| 6143658 | Multilevel wiring structure and method of fabricating a multilevel wiring structure | Kazuyoshi Ueno | 2000-11-07 |
| 5467732 | Device processing involving an optical interferometric thermometry | James A. McCaulley | 1995-11-21 |
| 5229303 | Device processing involving an optical interferometric thermometry using the change in refractive index to measure semiconductor wafer temperature | James A. McCaulley | 1993-07-20 |
| 4645687 | Deposition of III-V semiconductor materials | Robert F. Karlicek, Jr. | 1987-02-24 |
| 4498953 | Etching techniques | Joel M. Cook, Daniel Flamm, Dale E. Ibbotson, John A. Mucha | 1985-02-12 |
| 4397711 | Crystallographic etching of III-V semiconductor materials | Daniel Flamm, Dale E. Ibbotson | 1983-08-09 |
| 4394237 | Spectroscopic monitoring of gas-solid processes | Daniel Flamm, Robert F. Karlicek, Jr. | 1983-07-19 |
| 4377436 | Plasma-assisted etch process with endpoint detection | Daniel Flamm | 1983-03-22 |
| 4359485 | Radiation induced deposition of metal on semiconductor surfaces | Robert F. Karlicek, Jr. | 1982-11-16 |