| 10971887 |
Laser device and laser device control method |
— |
2021-04-06 |
| 10102938 |
Extreme ultraviolet light generating apparatus |
Takayuki Yabu, Tamotsu Abe, Kenichi Miyao |
2018-10-16 |
| 9954340 |
Excimer laser apparatus and excimer laser system |
Takeshi Ohta, Hiroaki TSUSHIMA, Osamu Wakabayashi |
2018-04-24 |
| 9425576 |
Excimer laser apparatus and excimer laser system |
Takeshi Ohta, Hiroaki TSUSHIMA, Osamu Wakabayashi |
2016-08-23 |
| 8867583 |
Excimer laser apparatus and excimer laser system |
Takeshi Ohta, Hiroaki TSUSHIMA, Osamu Wakabayashi |
2014-10-21 |
| 8569722 |
Extreme ultraviolet light generation apparatus |
Kouji Kakizaki, Osamu Wakabayashi |
2013-10-29 |
| 8525140 |
Chamber apparatus, extreme ultraviolet light generation system, and method for controlling the extreme ultraviolet light generation system |
Osamu Wakabayashi |
2013-09-03 |
| 8502178 |
Extreme ultraviolet light source apparatus, method for controlling extreme ultraviolet light source apparatus, and recording medium with program recorded thereon |
Masato Moriya, Hideyuki Hayashi |
2013-08-06 |
| 8324600 |
Apparatus and method for measuring and controlling target trajectory in chamber apparatus |
Hideyuki Hayashi, Kouji Kakizaki, Toshihiro Nishisaka |
2012-12-04 |
| 6031341 |
Miniaturized transformer and inverter circuit and discharge tube glow circuit including such miniaturized transformer |
Yoshihito Yoshizawa, Shunsuke Arakawa |
2000-02-29 |
| 5751092 |
Piezoelectric transformer and power converting apparatus employing the same |
— |
1998-05-12 |
| 5705879 |
Discharge tube driving device and piezoelectric transformer therefor |
Sigeru Jomura, Toshiyuki Tamakai |
1998-01-06 |
| 5635828 |
Active filter circuit and power supply apparatus including same |
Yoshihito Yoshizawa, Shin Nakajima, Shunsuke Arakawa |
1997-06-03 |
| 5322612 |
Carbon dioxide gas detection element |
Takaaki Kuroiwa, Yoshihiko Sadaoka |
1994-06-21 |
| 5296819 |
Polymer capacitative moisture sensitive device comprising heating means |
Takaaki Kuroiwa, Tetsuya Miyagishi |
1994-03-22 |
| 5161085 |
Moisture sensitive element and method of manufacturing the same |
Yoshirou Sakai, Yoshihiko Sadaoka, Masanobu Matsuguchi, Takaaki Kuroiwa |
1992-11-03 |
| 4920451 |
Moisture-sensitive element |
Yoshiro Sakai, Yoshihiko Sadaoka, Takaai Kuroiwa, Tetsuya Miyagishi |
1990-04-24 |