Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10423081 | Reticle cooling by non-uniform gas flow | Geoffrey Alan Schultz, Daniel N. Galburt, Daniel Nathan Burbank, Santiago E. DELPUERTO, Herman Vogel +3 more | 2019-09-24 |
| 9632434 | Reticle cooling system in a lithographic apparatus | Earl William Ebert, Johannes Onvlee, Samir Nayfeh, Mark Josef Schuster, Peter A. Delmastro +6 more | 2017-04-25 |