Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6926774 | Piezoelectric vaporizer | Joel M. Huston | 2005-08-09 |
| 6418960 | Ultrasonic enhancement for solvent purge of a liquid delivery system | Donald M. Mintz | 2002-07-16 |
| 6350320 | Heater for processing chamber | Semyon Sherstinsky, Alison Gilliam, Paul Smith, Leonel A. Zuniga, Nitin Khurana +4 more | 2002-02-26 |
| 6345642 | Method and apparatus for removing processing liquid from a processing liquid path | Tushar Mandrekar, Nitin Khurana, Anish Tolia | 2002-02-12 |