Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062548 | Etching method for oxide semiconductor film | AKIKO HIRATA, Masanaga Fukasawa, Satoshi Hamaguchi, Kazuhiro Karahashi | 2024-08-13 |
| 10998174 | Dry etching equipment and method for producing semiconductor device | Nobuyuki Kuboi | 2021-05-04 |
| 10403516 | Etching characteristic estimation method, program, information processing apparatus, processing apparatus, designing method, and production method | Nobuyuki Kuboi | 2019-09-03 |
| 9411914 | Simulator, processing system, damage evaluation method and damage evaluation program | Nobuyuki Kuboi | 2016-08-09 |
| 9287097 | Predicting ultraviolet ray damage with visible wavelength spectroscopy during a semiconductor manufacturing process | Nobuyuki Kuboi, Masanaga Fukasawa | 2016-03-15 |
| 8747685 | Shape simulation apparatus, shape simulation program, semiconductor production apparatus, and semiconductor device production method | Nobuyuki Kuboi, Takashi Kinoshita | 2014-06-10 |
| 8685856 | Solid-state imaging device, fabrication method thereof, imaging apparatus, and fabrication method of anti-reflection structure | Kensaku Maeda, Kaoru Koike, Tohru Sasaki | 2014-04-01 |
| 8649893 | Semiconductor manufacturing device, semiconductor device manufacturing method, simulation device, and simulation program | Nobuyuki Kuboi | 2014-02-11 |
| 8535550 | Shape simulation apparatus, shape simulation program, semiconductor production apparatus, and semiconductor device production method | Nobuyuki Kuboi, Takashi Kinoshita | 2013-09-17 |
| 7808026 | Dry etching method and production method of magnetic memory device | Toshiaki Shiraiwa, Seiji Samukawa | 2010-10-05 |
| 7473646 | Dry etching method and production method of magnetic memory device | Toshiaki Shiraiwa, Seiji Samukawa | 2009-01-06 |
| 7439068 | Plasma monitoring method, plasma processing method, method of manufacturing semiconductor device, and plasma processing system | — | 2008-10-21 |
| 5660681 | Method for removing sidewall protective film | Seiichi Fukuda | 1997-08-26 |
| 5378311 | Method of producing semiconductor device | Tetsuji Nagayama | 1995-01-03 |
| 5368686 | Dry etching method for W polycide using sulfur deposition | Tetsuji Nagayama | 1994-11-29 |
| 5362361 | Dry etching method | — | 1994-11-08 |
| 5354421 | Dry etching method | Shingo Kadomura, Tetsuji Nagayama | 1994-10-11 |
| 5266154 | Dry etching method | — | 1993-11-30 |
| 5227341 | Method of manufacturing a semiconductor device using an isopropyl alcohol ashing step | Yukihiro Kamide, Shingo Kadomura | 1993-07-13 |
| 5211790 | Dry etching method by sulfur conditioning | — | 1993-05-18 |
| 5200028 | Etching process of silicon material | — | 1993-04-06 |
| 5180464 | Dry etching method | Shingo Kadomura | 1993-01-19 |