Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11315064 | Information processing device and production instruction support method | Keita Nogi | 2022-04-26 |
| 9507328 | Processing chamber allocation setting device and processing chamber allocation setting program | Keita Nogi, Satomi Inoue | 2016-11-29 |
| 9385016 | Semiconductor processing system and program | Hideaki Kondo, Keita Nogi | 2016-07-05 |
| 9343340 | Vacuum processing apparatus | Keita Nogi, Hideaki Kondo, Susumu Tauchi | 2016-05-17 |
| 9011065 | Vacuum processing apparatus and operating method of vacuum processing apparatus | Susumu Tauchi, Hideaki Kondo, Keita Nogi, Atsushi Shimoda, Takafumi Chida | 2015-04-21 |
| 8849446 | Vacuum processing apparatus and program | Hideaki Kondo, Susumu Tauchi, Keita Nogi | 2014-09-30 |
| 8812151 | Vacuum process device and vacuum process method | Keita Nogi, Satomi Inoue, Michinori Kawaguchi | 2014-08-19 |
| 8588962 | Vacuum processing device and method of transporting process subject member | Keita Nogi, Yoshiro Suemitsu, Michinori Kawaguchi, Satomi Inoue | 2013-11-19 |
| 8538573 | Vacuum processing apparatus and program | Hideaki Kondo, Susumu Tauchi, Keita Nogi | 2013-09-17 |