Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5760573 | Plasma density monitor and method | Ajit Paranjpe | 1998-06-02 |
| 5389153 | Plasma processing system using surface wave plasma generating apparatus and method | Ajit Paranjpe | 1995-02-14 |
| 5345534 | Semiconductor wafer heater with infrared lamp module with light blocking means | Habib N. Najm, Cecil J. Davis, Robert T. Matthews | 1994-09-06 |
| 5262610 | Low particulate reliability enhanced remote microwave plasma discharge device | Cecil J. Davis, Rhett B. Jucha, Lee M. Loewenstein | 1993-11-16 |
| 5101764 | Method and apparatus for integrating optical sensor into processor | Lee M. Loewenstein, Thomas E. Tang, Ming-Jang Hwang, Rachelle J. Bienstock | 1992-04-07 |
| 4996077 | Distributed ECR remote plasma processing and apparatus | Mehrdad M. Moslehi | 1991-02-26 |
| 4988644 | Method for etching semiconductor materials using a remote plasma generator | Rhett B. Jucha, Cecil J. Davis, Lee M. Loewenstein, Jeff D. Achenbach | 1991-01-29 |