Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10526708 | Methods for forming thin protective and optical layers on substrates | Stephen E. Savas, Carl Galewski, Hood Chatham, Sai Mantripragada, Allan B. Wiesnoski | 2020-01-07 |
| 10147507 | Steam generator for a nuclear reactor | John T. Groome, James Allan Nylander | 2018-12-04 |
| 10049859 | Plasma generating units for processing a substrate | Stephen E. Savas, Carl Galewski, Allan B. Wiesnoski, Sai Mantripragada | 2018-08-14 |
| 9443702 | Methods for plasma processing | Stephen E. Savas, Carl Galewski, Allan B. Wiesnoski, Sai Mantripragada | 2016-09-13 |
| 9359674 | Apparatus and method for dielectric deposition | Stephen E. Savas, Sai Mantripragada, Allan B. Wiesnoski, Carl Galewski | 2016-06-07 |
| 9230697 | Steam generator for a nuclear reactor | John T. Groome, James Allan Nylander | 2016-01-05 |
| 9096932 | Methods for plasma processing | Stephen E. Savas, Carl Galewski, Allan B. Wiesnoski, Sai Mantripragada | 2015-08-04 |
| 9096933 | Methods for plasma processing | Stephen E. Savas, Carl Galewski, Allan B. Wiesnoski, Sai Mantripragada | 2015-08-04 |
| 8765232 | Apparatus and method for dielectric deposition | Stephen E. Savas, Sai Mantripragada, Allan B. Wiesnoski, Carl Galewski | 2014-07-01 |
| 8697197 | Methods for plasma processing | Stephen E. Savas, Carl Galewski, Allan B. Wiesnoski, Sai Mantripragada | 2014-04-15 |
| 8291935 | Flexible gas mixing manifold | Neil J. Merritt, Kevin D. Jennings, George Gilbert, David E. Bowser | 2012-10-23 |
| 6918824 | Uniform fluid distribution and exhaust system for a chemical-mechanical planarization device | Dave Marquardt, David Cohen, Edward J. McInerney | 2005-07-19 |
| 6758591 | Mixing of materials in an integrated circuit manufacturing equipment | Peter Krotov, Colin F. Smith, Randy K. Hall | 2004-07-06 |