| 12283522 |
Planarization apparatus, planarization process, and method of manufacturing an article |
Ozkan Ozturk, Christopher Ellis Jones, Se-Hyuk Im |
2025-04-22 |
| 12282251 |
Method of shaping a surface, shaping system, and method of manufacturing an article |
Byung-Jin Choi, Xiaoming Lu |
2025-04-22 |
| 12242205 |
Reaction chamber with stop-gapped vacuum seal |
Byung-Jin Choi, Alex Ruiz |
2025-03-04 |
| 12165903 |
Chuck assembly, planarization process, apparatus and method of manufacturing an article |
Se-Hyuk Im, Byung-Jin Choi |
2024-12-10 |
| 12138747 |
Planarization process, apparatus and method of manufacturing an article |
Byung-Jin Choi, Ozkan Ozturk, Masaki Saito |
2024-11-12 |
| 12027373 |
Planarization process, planarization system, and method of manufacturing an article |
Steven C. Shackleton, Xiaoming Lu, Byung-Jin Choi |
2024-07-02 |
| 11908711 |
Planarization process, planarization system and method of manufacturing an article |
Steven C. Shackleton, Masaki Saito |
2024-02-20 |
| 11776840 |
Superstrate chuck, method of use, and method of manufacturing an article |
Nilabh K. Roy, Mario Johannes Meissl, Ozkan Ozturk, Byung-Jin Choi |
2023-10-03 |
| 11725272 |
Method, system and apparatus for cooling a substrate |
Byung-Jin Choi, Alex Ruiz, Nilabh K. Roy |
2023-08-15 |
| 11728203 |
Chuck assembly, planarization process, apparatus and method of manufacturing an article |
Se-Hyuk Im, Byung-Jin Choi |
2023-08-15 |
| 11590687 |
Systems and methods for reducing pressure while shaping a film |
Niyaz Khusnatdinov, Mario Johannes Meissl |
2023-02-28 |
| 11562924 |
Planarization apparatus, planarization process, and method of manufacturing an article |
Ozkan Ozturk, Christopher Ellis Jones, Se-Hyuk Im |
2023-01-24 |
| 11198235 |
Flexible mask modulation for controlling atmosphere between mask and substrate and methods of using the same |
— |
2021-12-14 |
| 11145535 |
Planarization process, apparatus and method of manufacturing an article |
Byung-Jin Choi, Se-Hyuk Im |
2021-10-12 |
| 11043407 |
Planarization process, apparatus and method of manufacturing an article |
Byung-Jin Choi, Masaki Saito, Ozkan Ozturk |
2021-06-22 |
| 11040366 |
Dispenser shield with adjustable aperture to improve drop placement and residual layer thickness |
Logan L. Simpson, John Williamson |
2021-06-22 |
| 11034057 |
Planarization process, apparatus and method of manufacturing an article |
Ozkan Ozturk, Masaki Saito, Alireza Aghili, Steven C. Shackleton, Byung-Jin Choi |
2021-06-15 |
| 10996561 |
Nanoimprint lithography with a six degrees-of-freedom imprint head module |
Jeremy Lee Sevier, Byung-Jin Choi, Philip D. Schumaker, Mario Johannes Meissl |
2021-05-04 |
| 10895806 |
Imprinting method and apparatus |
Mehul N. Patel, Edward Brian Fletcher, Alireza Aghili |
2021-01-19 |
| 10754078 |
Light source, a shaping system using the light source and an article manufacturing method |
— |
2020-08-25 |
| 10416576 |
Optical system for use in stage control |
Yeshwanth Srinivasan, Philip D. Schumaker |
2019-09-17 |
| 9971249 |
Method and system for controlled ultraviolet light exposure |
Yeshwanth Srinivasan |
2018-05-15 |
| 9778578 |
Low contact imprint lithography template chuck system for improved overlay correction |
Mario Johannes Meissl, Anshuman Cherala, Byung-Jin Choi |
2017-10-03 |
