Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9005413 | Film formation apparatus | Shuji Kodaira, Tomoyuki Yoshihama, Koukichi Kamada, Kazumasa Horita, Junichi Hamaguchi +1 more | 2015-04-14 |
| 8809193 | Method for the formation of Co film and method for the formation of Cu interconnection film | Shoichiro Kumamoto, Harunori Ushikawa | 2014-08-19 |
| 8796142 | Method for forming tantalum nitride film | Narishi Gonohe, Harunori Ushikawa, Tomoyasu Kondo, Kyuzo Nakamura | 2014-08-05 |
| 8158197 | Method for forming tantalum nitride film | Narishi Gonohe, Harunori Ushikawa, Tomoyasu Kondo, Kyuzo Nakamura | 2012-04-17 |
| 8158198 | Method for forming tantalum nitride film | Narishi Gonohe, Harunori Ushikawa, Tomoyasu Kondo, Kyuzo Nakamura | 2012-04-17 |
| 8105468 | Method for forming tantalum nitride film | Narishi Gonohe, Harunori Ushikawa, Tomoyasu Kondo, Kyuzo Nakamura | 2012-01-31 |
| 6280585 | Sputtering apparatus for filling pores of a circular substrate | Hisaharu Obinata, Tetsuji Kiyota, Yoshiyuki Kadokura | 2001-08-28 |
| 4816046 | Fine particle collector trap for vacuum evacuating system | Yoshiyasu Maeba, Humio Naruse | 1989-03-28 |