Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6280585 | Sputtering apparatus for filling pores of a circular substrate | Hisaharu Obinata, Satoru Toyoda, Yoshiyuki Kadokura | 2001-08-28 |
| 5770025 | Magnetron sputtering apparatus | — | 1998-06-23 |