Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6290826 | Composite sputtering cathode assembly and sputtering apparatus with such composite sputtering cathode assembly | Morohisa Tamura, Yasushi Higuchi, Takashi Komatsu | 2001-09-18 |
| 6280585 | Sputtering apparatus for filling pores of a circular substrate | Tetsuji Kiyota, Satoru Toyoda, Yoshiyuki Kadokura | 2001-08-28 |
| 5753090 | Small size sputtering target and high vacuum sputtering apparatus using the same | — | 1998-05-19 |
| 5011793 | Vacuum deposition using pressurized reflow process | — | 1991-04-30 |
| 4624767 | Sputter etching apparatus having a second electrically floating electrode and magnet means | — | 1986-11-25 |