Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6290826 | Composite sputtering cathode assembly and sputtering apparatus with such composite sputtering cathode assembly | Hisaharu Obinata, Yasushi Higuchi, Takashi Komatsu | 2001-09-18 |