Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9337092 | Method of manufacturing semiconductor device | Junichi Hamaguchi, Shuji Kodaira, Yuta SAKAMOTO, Akifumi Sano, Koukichi Kamada +3 more | 2016-05-10 |
| 6280585 | Sputtering apparatus for filling pores of a circular substrate | Hisaharu Obinata, Tetsuji Kiyota, Satoru Toyoda | 2001-08-28 |