AS

Akifumi Sano

UL Ulvac: 2 patents #199 of 680Top 30%
Overall (All Time): #2,006,131 of 4,157,543Top 50%
2
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
9337092 Method of manufacturing semiconductor device Junichi Hamaguchi, Shuji Kodaira, Yuta SAKAMOTO, Koukichi Kamada, Yoshiyuki Kadokura +3 more 2016-05-10
8377269 Sputtering apparatus Naoki Morimoto, Tomoyasu Kondo, Hideto Nagashima, Daisuke Mori 2013-02-19