Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112929 | Cathode unit for magnetron sputtering apparatus and magnetron sputtering apparatus | Koji Suzuki, Katsuya Hara, Hideki Mataga | 2024-10-08 |
| 11923178 | Vacuum processing apparatus | Koji Suzuki, Yoshinori Fujii | 2024-03-05 |
| 11629400 | Sputtering target and method of producing the same | Akira Nakamura, Hisashi Iwashige, Seiya Nishi, Koji Suzuki | 2023-04-18 |
| 11549173 | Sputtering apparatus | Koji Suzuki, Yukihito Tashiro | 2023-01-10 |
| 8956513 | Substrate processing method | Shinya Nakamura, Yoshinori Fujii | 2015-02-17 |
| 8377269 | Sputtering apparatus | Naoki Morimoto, Tomoyasu Kondo, Daisuke Mori, Akifumi Sano | 2013-02-19 |
| 6706155 | Sputtering apparatus and film manufacturing method | Naoki Morimoto, Tomoyasu Kondo | 2004-03-16 |