HM

Hideki Mataga

UL Ulvac: 1 patents #339 of 680Top 50%
Overall (All Time): #2,536,217 of 4,157,543Top 65%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12112929 Cathode unit for magnetron sputtering apparatus and magnetron sputtering apparatus Koji Suzuki, Hideto Nagashima, Katsuya Hara 2024-10-08