Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11923178 | Vacuum processing apparatus | Koji Suzuki, Hideto Nagashima | 2024-03-05 |
| 11319627 | Vacuum processing apparatus | — | 2022-05-03 |
| 11239063 | Vacuum processing apparatus | — | 2022-02-01 |
| 11239064 | Magnet unit for magnetron sputtering apparatus | Shinya Nakamura | 2022-02-01 |
| 11230760 | Sputtering apparatus and method of forming film | Shinya Nakamura | 2022-01-25 |
| 11131479 | Air-conditioning apparatus indoor unit | Yoshinori MIYATA, Yasuyuki Kotake, Yasutomo Hirai, Takahiro Iinuma | 2021-09-28 |
| 10435783 | Target assembly | Shinya Nakamura, Yoshihiro Ikeda, Yuusuke Miyaguchi, Kazuyoshi Hashimoto, Kengo Tsutsumi | 2019-10-08 |
| 10288931 | LCD device | Kazuya Goda | 2019-05-14 |
| 10233536 | Sputtering apparatus and method of discriminating state thereof | Shinya Nakamura | 2019-03-19 |
| 9972479 | Target assembly | Shinya Nakamura, Yoshihiro Ikeda, Yuusuke Miyaguchi | 2018-05-15 |
| 9960018 | RF sputtering apparatus and sputtering method | Shinya Nakamura | 2018-05-01 |
| 9139381 | Transport apparatus and vacuum system | — | 2015-09-22 |
| 9093485 | Transport method | — | 2015-07-28 |
| 8956513 | Substrate processing method | Shinya Nakamura, Hideto Nagashima | 2015-02-17 |
| 8688276 | Teaching method for transfer robot | — | 2014-04-01 |
| 8688246 | Operation monitoring system for processing apparatus | — | 2014-04-01 |
| 8543235 | Method of controlling transfer robot | — | 2013-09-24 |
| 8393662 | Robot hand for substrate transfer | Shinya Nakamura | 2013-03-12 |
| 8390230 | Method of detecting stop of transport apparatus | — | 2013-03-05 |
| 8246536 | Treatment tool insertion channel of endoscope | Kunitaka OCHI, Naoki Tanaka, Kikuo Iwasaka, Satoru Kaneda | 2012-08-21 |
| 8141926 | Robot hand for substrate transfer | Shinya Nakamura | 2012-03-27 |
| 7918640 | Position correcting apparatus, vacuum processing equipment and position correcting method | — | 2011-04-05 |
| 7821767 | Electrostatic chuck device | — | 2010-10-26 |
| 7604401 | Substrate temperature measurement apparatus and processing apparatus | — | 2009-10-20 |
| 6894143 | Polyether polymer, process for producing the same, composition for solid polymer electrolyte, and use thereof | Hideyuki Nishio, Hidenori Onishi | 2005-05-17 |