Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11894220 | Method and apparatus for controlling a processing reactor | Michael Nichols, Tina Dhekial-Phukan, Venkata Ravishankar Kasibhotla, Ajit Balakrishna | 2024-02-06 |
| 11823937 | Calibration of an aligner station of a processing system | Nicholas Michael Bergantz, Andreas Schmid, Leon Volfovski, Damon K. Cox, Paul Z. Wirth | 2023-11-21 |
| 11133205 | Wafer out of pocket detection | Prasanth Narayanan, Subramanian Tamilmani, Mandyam Sriram | 2021-09-28 |