Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278110 | Bias voltage modulation approach for SiO/SiN layer alternating etch process | Sean S. Kang, Olivier Luere, Kenji Takeshita, Mengnan ZOU, Zihao Ding | 2025-04-15 |
| 9484215 | Sulfur and fluorine containing etch chemistry for improvement of distortion and bow control for har etch | Joseph James VEGH, Kyeong-Koo Chi | 2016-11-01 |