Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971341 | Plasma processing apparatus | Ryouhei Satou, Yuichi Kuwahara, Syuntaro TAWARAYA | 2021-04-06 |
| 10504698 | Plasma processing apparatus | Masayuki Kohno, Naoki Matsumoto, Jun Yoshikawa, Michitaka Aita, Ippei Shimizu +4 more | 2019-12-10 |
| 9412565 | Temperature measuring method and plasma processing system | Yusuke Yoshida, Takahiro Senda, Masayuki Kohno, Naoki Matsumoto | 2016-08-09 |
| 8183158 | Semiconductor processing apparatus and method for using same | Masahiko Tomita, Kota Umezawa, Toshiharu Nishimura | 2012-05-22 |
| 8080109 | Film formation apparatus and method for using the same | Mitsuhiro Okada, Satoshi Takagi, Masahiko Tomita, Yamato Tonegawa, Toshiharu Nishimura | 2011-12-20 |