Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6712020 | Toroidal plasma source for plasma processing | Michael S. Cox, Canfeng Lai, David Wanamaker, Christopher T. Lane, Peter Loewenhardt +2 more | 2004-03-30 |
| 6418874 | Toroidal plasma source for plasma processing | Michael S. Cox, Canfeng Lai, David Wanamaker, Christopher T. Lane, Peter Loewenhardt +2 more | 2002-07-16 |
| 6176198 | Apparatus and method for depositing low K dielectric materials | Yeh-Jen Kao, Fong Chang, John Parks, David Wanamaker, Yen-Kun Wang | 2001-01-23 |
| 6148761 | Dual channel gas distribution plate | Yeh-Jen Kao, Yen-Kun Wang | 2000-11-21 |