Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276919 | Method for controlling a semiconductor manufacturing process | Marc Hauptmann, Cornelis Johannes Henricus LAMBREGTS, Amir Bin Ismail, Allwyn Boustheen, Raheleh Pishkari +4 more | 2025-04-15 |
| 12085913 | Method for generating a control scheme and device manufacturing method | Marc Hauptmann, Amir Bin Ismail, Jiapeng Li | 2024-09-10 |
| 12078935 | Device manufacturing methods | Hakki Ergün Cekli, Cédric Désiré Grouwstra | 2024-09-03 |
| 11774862 | Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus | Hakki Ergün Cekli, Masashi Ishibashi, Wendy Johanna Martina Van De Ven, Willem Seine Christian Roelofs, Elliott Gerard McNamara +3 more | 2023-10-03 |
| 11709434 | Device manufacturing method | Cornelis Johannes Henricus LAMBREGTS, Wolfgang Henke | 2023-07-25 |
| 11442366 | Device manufacturing methods | Hakki Ergün Cekli, Cédric Désiré Grouwstra | 2022-09-13 |
| 11175591 | Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus | Hakki Ergün Cekli, Masashi Ishibashi, Wendy Johanna Martina Van De Ven, Willem Seine Christian Roelofs, Elliott Gerard McNamara +3 more | 2021-11-16 |