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Resist pattern-forming method, and radiation-sensitive resin composition |
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Pattern-forming method, and radiation-sensitive resin composition |
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Resist pattern-forming method, resist pattern-forming radiation-sensitive resin composition, and resist film |
Hiromitsu Nakashima, Toru Kimura, Yusuke Asano, Masafumi Hori, Kazuki Kasahara +2 more |
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Resist pattern-forming method, and radiation-sensitive resin composition |
Hirokazu Sakakibara, Taiichi Furukawa, Masafumi Hori |
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Radiation-sensitive resin composition, method for forming resist pattern and polymer |
Kazuo Nakahara, Hiromitsu Nakashima |
2013-12-17 |
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Radiation-sensitive resin composition and resist film formed using the same |
Toru Kimura, Hiromitsu Nakashima, Kazuki Kasahara, Masafumi Hori, Masafumi Yoshida |
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Radiation-sensitive resin composition, polymer and compound |
Hiromitsu Nakashima, Kazuo Nakahara, Mitsuo Sato |
2013-12-17 |