Issued Patents All Time
Showing 51–52 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9617638 | Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD system | Adrien LaVoie, Hu Kang, Shankar Swaminathan, Jun Qian, Frank L. Pasquale +1 more | 2017-04-11 |
| 7932534 | High light extraction efficiency solid state light sources | Rajiv Singh, Deepika Singh | 2011-04-26 |