Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9552979 | Cyclic aluminum nitride deposition in a batch reactor | Werner Knaepen, Bert Jongbloed, Dieter Pierreux, Hessel Sprey, Cornelius A. van der Jeugd +4 more | 2017-01-24 |
| 8242029 | Method for forming a silicon dioxide/metal oxide-nanolaminate with a desired wet etch rate | Hyung Sang Park, Stijn De Vusser | 2012-08-14 |
| 7718518 | Low temperature doped silicon layer formation | Theodorus Gerardus Maria Oosterlaken, Steven R. A. Van Aerde, Pamela Rene Fischer | 2010-05-18 |
| 7691757 | Deposition of complex nitride films | Suvi Haukka, Tanja Claasen | 2010-04-06 |