Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11289487 | Doped titanium nitride materials for DRAM capacitors, and related semiconductor devices, systems, and methods | Matthew N. Rocklein, Sanket S. Kelkar, Christopher W. Petz, Zhe Song, Vassil Antonov +1 more | 2022-03-29 |
| 11011521 | Semiconductor structure patterning | Sevim Korkmaz, Devesh Dadhich Shreeram, Srinivasan Balakrishnan, Dewali Ray, Sanjeev Sapra | 2021-05-18 |
| 10985239 | Oxidative trim | Matthew N. Rocklein, An-Jen B. Cheng, Fredrick Fishburn, Sevim Korkmaz | 2021-04-20 |
| 10964536 | Formation of an atomic layer of germanium in an opening of a substrate material having a high aspect ratio | Francois H. Fabreguette, Gurtej S. Sandhu, John Smythe, Matthew N. Rocklein | 2021-03-30 |
| 10811419 | Storage node shaping | Devesh Dadhich Shreeram, Sanket S. Kelkar, Gurpreet Lugani, Matthew N. Rocklein, Sanjeev Sapra +1 more | 2020-10-20 |
| 5783804 | Reflectance method for accurate process calibration in semiconductor substrate heat treatment | Robert Burke, Russell C. Zahorik, Randhir P. S. Thakur | 1998-07-21 |
| 5618461 | Reflectance method for accurate process calibration in semiconductor wafer heat treatment | Robert Burke, Russell C. Zahorik, Randhir P. S. Thakur | 1997-04-08 |