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Sho IKEDA, Kenichi Miyamoto, Akihiro Adachi |
2024-05-14 |
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System, control device, and module |
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2022-01-04 |
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Charged particle beam apparatus |
Momoyo Enyama, Hiroya Ohta |
2013-11-26 |
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Charged particle beam equipments, and charged particle beam microscope |
Hiroya Ohta |
2011-09-20 |
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Charged particle beam application system |
Tadashi Kanosue, Yasunari Sohda, Susumu Goto |
2008-06-10 |
| 7341144 |
Case with hinged lid |
Takeshi Tajiri, Yasushi Kimura |
2008-03-11 |
| 7173262 |
Charged particle beam exposure apparatus, charged particle beam exposure method and device manufacturing method |
Masaki Hosoda, Masato Muraki |
2007-02-06 |
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Method of charged particle beam lithography and equipment for charged particle beam lithography |
Sayaka Tanimoto, Yasunari Sohda, Yoshinori Nakayama, Haruo Yoda, Masaki Hosoda |
2006-09-12 |
| 7098464 |
Electron beam writing equipment and electron beam writing method |
Yasunari Sohda, Yoshinori Nakayama, Sayaka Tanimoto, Masato Muraki |
2006-08-29 |
| 7049607 |
Electron beam writing equipment and electron beam writing method |
Yasunari Sohda, Hiroya Ohta, Susumu Gotoh |
2006-05-23 |
| 7041988 |
Electron beam exposure apparatus and electron beam processing apparatus |
Shinichi Hamaguchi, Susumu Goto, Yasunari Sohda |
2006-05-09 |
| 7015482 |
Electron beam writing equipment using plural beams and method |
Yasunari Sohda, Yoshinori Nakayama, Masato Muraki, Masaki Takakuwa |
2006-03-21 |
| 7005659 |
Charged particle beam exposure apparatus, charged particle beam exposure method, and device manufacturing method using the same apparatus |
Masato Muraki, Hiroya Ohta |
2006-02-28 |
| 6969862 |
Charged-particle-beam exposure apparatus and method of controlling same |
Masato Muraki, Masaki Takakuwa |
2005-11-29 |
| 6838682 |
Electron beam exposure equipment and electron beam exposure method |
Yasunari Sohda, Hiroya Ohta, Susumu Gotoh |
2005-01-04 |
| 6809319 |
Electron beam writing equipment and electron beam writing method |
Yasunari Sohda, Hiroya Ohta, Susumu Gotoh |
2004-10-26 |
| 6031494 |
Handy-phone with shielded high and low frequency circuits and planar antenna |
Hiroshi Okabe, Ken Takei, Yoshitaka Imakado |
2000-02-29 |
| 5373112 |
Multilayered wiring board having printed inductor |
Kunio Matsumoto |
1994-12-13 |
