Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6856404 | Scanning exposure method and apparatus, and device manufacturing method using the same | Kazunori Iwamoto | 2005-02-15 |
| 6638672 | Exposure apparatus, coating/developing apparatus, method of transferring a substrate, method of producing a device, semiconductor production factory, and method of maintaining an exposure apparatus | — | 2003-10-28 |
| 6608666 | Reference plate, exposure apparatus, device manufacturing system, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method | Tetsuya Mori | 2003-08-19 |
| 6493062 | Driving apparatus and exposure apparatus | Yukio Tokuda, Shigeyuki Uzawa, Yukio Takabayashi, Hiromichi Hara | 2002-12-10 |
| 4747608 | Wafer chuck | Mitsuya Sato, Shunzo Imai | 1988-05-31 |