Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11426834 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2022-08-30 |
| 10486285 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2019-11-26 |
| 9687957 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2017-06-27 |
| 9358662 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2016-06-07 |
| 8795032 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2014-08-05 |
| 8742568 | Circuit board, semiconductor device, process for manufacturing circuit board and process for manufacturing semiconductor device | Masayoshi Kondo, Daisuke Fujiwara, Yuka Ito | 2014-06-03 |
| 8038136 | Hand having rocking mechanism and substrate delivering device having the same | Hiroki SANEMASA, Hideo Yamamoto, Naoomi Torii, Takahiro Ogawa, Seiji Katsuoka +1 more | 2011-10-18 |
| 7901550 | Plating apparatus | Keisuke Namiki, Kunihito Ide, Junji Kunisawa, Katsuyuki Musaka | 2011-03-08 |
| 7442282 | Electrolytic processing apparatus and method | Junji Kunisawa | 2008-10-28 |
| 7387717 | Method of performing electrolytic treatment on a conductive layer of a substrate | Junji Kunisawa, Mitsuko Odagaki, Koji Mishima, Kenji Nakamura, Hiroaki Inoue +7 more | 2008-06-17 |
| 7374646 | Electrolytic processing apparatus and substrate processing method | Hidenao Suzuki, Kazufumi Nomura, Kunihito Ide, Hiroyuki Kanda, Koji Mishima +2 more | 2008-05-20 |
| 7208074 | Substrate processing apparatus and substrate plating apparatus | Koji Mishima, Junji Kunisawa, Norio Kimura, Hiroaki Inoue, Kenji Nakamura +3 more | 2007-04-24 |
| 6767437 | Electroplating apparatus and electroplating method | Tetsuo Matsuda, Hisashi Kaneko, Koji Mishima, Junji Kunisawa | 2004-07-27 |
| 6746589 | Plating method and plating apparatus | Koji Mishima, Hiroaki Inoue, Junji Kunisawa, Kenji Nakamura, Tetsuo Matsuda +2 more | 2004-06-08 |
| 6689257 | Substrate processing apparatus and substrate plating apparatus | Koji Mishima, Junji Kunisawa, Norio Kimura, Hiroaki Inoue, Kenji Nakamura +3 more | 2004-02-10 |
| 6632335 | Plating apparatus | Junji Kunisawa, Mitsuko Odagaki, Koji Mishima, Kenji Nakamura, Hiroaki Inoue +7 more | 2003-10-14 |