Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11702738 | Chamber processes for reducing backside particles | Yi Zhou, Xinyue Chen, Yangchung Lee | 2023-07-18 |
| 10115608 | Method and apparatus for rapid pump-down of a high-vacuum loadlock | Edmund Minshall, Victor F. Morris, Ram Charan, Ronald A. Powell | 2018-10-30 |
| 9275884 | Systems and methods for inhibiting oxide growth in substrate handler vacuum chambers | Ronald A. Powell, Arun Keshavamurthy, Richard M. Blank | 2016-03-01 |
| 6726824 | Closed loop monitoring of electroplating bath constituents using mass spectrometry | — | 2004-04-27 |
| 6667474 | Capillary tube assembly with replaceable capillary tube | Jeffrey Abramson, Nigel P. Gore, Iain C. Mylchreest, Keqi Tang, Eric B. Johnson | 2003-12-23 |
| 6554914 | Passivation of copper in dual damascene metalization | Robert T. Rozbicki, Ronald A. Powell, Erich R. Klawuhn, Michal Danek, Karl B. Levy +2 more | 2003-04-29 |
| 6497734 | Apparatus and method for enhanced degassing of semiconductor wafers for increased throughput | Kenneth K. Barber, Mark Fissel, Soo Yun Joh, Karl B. Levy, Robert Martinson +2 more | 2002-12-24 |
| 6441370 | Linear multipole rod assembly for mass spectrometers | Berg A. Tehlirian | 2002-08-27 |
| 6319842 | Method of cleansing vias in semiconductor wafer having metal conductive layer | Lap Tam, Ronald A. Powell, Ronald D. Allen, Robert T. Rozbicki, Erich R. Klawuhn +1 more | 2001-11-20 |
| 5543625 | Filament assembly for mass spectrometer ion sources | Bruce S. Johnson, John R. Herron, John Brassil, Alan E. Schoen | 1996-08-06 |