Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658016 | Shield for a substrate processing chamber | Kathleen Scheible, Goichi Yoshidome, Adolph Miller Allen, Cristopher M. Pavloff | 2023-05-23 |
| 10347475 | Holding assembly for substrate processing chamber | Kathleen Scheible, Goichi Yoshidome, Adolph Miller Allen, Christopher Pavloff | 2019-07-09 |
| 9127362 | Process kit and target for substrate processing chamber | Kathleen Scheible, Goichi Yoshidome, Adolph Miller Allen, Cristopher M. Pavloff | 2015-09-08 |
| 8900427 | Homing device for magnetron rotating on two arms | Keith A. Miller, Hari Ponnekanti | 2014-12-02 |
| 8605852 | Wedge positioning apparatus for jet pump assemblies in nuclear reactors | Stephen J. Kaylor, James M. DuBay, Rodney Lum | 2013-12-10 |
| 8021527 | Coaxial shafts for radial positioning of rotating magnetron | Keith A. Miller, Hari Ponnekanti | 2011-09-20 |
| 5864595 | Actuator for facilitating performance of work in a nuclear reactor | Brian H. Burrows, Neal Goldberg, Michael Y. Suekawa | 1999-01-26 |