| 10871091 |
Power system |
— |
2020-12-22 |
| 10728414 |
Detection apparatus, control method, and storage medium |
Yuki Sawai |
2020-07-28 |
| 10378641 |
Power system |
Yoshihiro Nakano, Jun Ohmura |
2019-08-13 |
| 7172683 |
Method of managing a plating liquid used in a plating apparatus |
Yasushi Isayama, Hiroyuki Ueyama, Hiroyuki Kaneko, Junitsu Yamakawa, Akihisa Hongo +1 more |
2007-02-06 |
| 7033463 |
Substrate plating method and apparatus |
Akihisa Hongo, Naoaki Ogure, Hiroaki Inoue, Satoshi Sendai, Tetsuma Ikegami +4 more |
2006-04-25 |
| 6908534 |
Substrate plating method and apparatus |
Akihisa Hongo, Mizuki Nagai, Kanji Ohno, Ryoichi Kimizuka |
2005-06-21 |
| 6800188 |
Copper plating bath and plating method for substrate using the copper plating bath |
Hideki Hagiwara, Ryoichi Kimizuka, Yoshitaka Terashima, Takashi Miyake, Hiroshi Nagasawa +2 more |
2004-10-05 |
| 6627066 |
Method of measuring the concentration of a leveler in a plating liquid |
Yasushi Isayama, Hiroyuki Ueyama, Hiroyuki Kaneko, Junitsu Yamakawa, Akihisa Hongo +1 more |
2003-09-30 |
| 6517894 |
Method for plating a first layer on a substrate and a second layer on the first layer |
Akihisa Hongo, Mizuki Nagai, Kanji Ohno, Ryoichi Kimizuka |
2003-02-11 |
