| 6101872 |
Sensor having a thin film element |
Martin Zechnall, Christoph Treutler, Manfred Lembke, Hans Hecht, Jiri Marek +5 more |
2000-08-15 |
| 5542558 |
Method for manufacturing micro-mechanical components using selective anodization of silicon |
Gerhard Benz, Jiri Marek, Frank Bantien, Horst Muenzel, Franz Laermer +2 more |
1996-08-06 |
| 5461917 |
Acceleration sensor |
Jiri Marek, Dietrich Schubert, Helmut Baumann, Horst Muenzel, Michael Offenberg |
1995-10-31 |
| 5355569 |
Method of making sensor |
Jiri Marek, Helmut Baumann, Guenther Findler, Michael Offenberg |
1994-10-18 |
| 5324410 |
Device for one-sided etching of a semiconductor wafer |
Nils Kummer, Jiri Marek, Guenther Findler |
1994-06-28 |
| 5310450 |
Method of making an acceleration sensor |
Michael Offenberg |
1994-05-10 |
| 5273939 |
Method of assembling micromechanical sensors |
Rolf Becker, Klaus Jaeckel, Jiri Marek, Frank Bantien, Helmut Baumann +1 more |
1993-12-28 |
| 5216273 |
Microvalve of multilayer silicon construction |
Christian Doering, Thomas Grauer, Michael Mettner, Armin Schuelke, Jiri Marek +2 more |
1993-06-01 |
