Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10186439 | Systems and methods for sensing process parameters during semiconductor device fabrication | Boyd Finlay, Eric Warren | 2019-01-22 |
| 8634949 | Manufacturing management using tool operating data | Brian C. Barker, Edward P. Higgins, Richard L. Kleinhenz, Gary R. Moore, Justin W. Wong +1 more | 2014-01-21 |
| 7864502 | In situ monitoring of wafer charge distribution in plasma processing | Kevin Boyd, James A Gallo, Edward P. Higgins, Barbara L Shiffler, Justin W. Wong | 2011-01-04 |
| 7094614 | In-situ monitoring of chemical vapor deposition process by mass spectrometry | Douglas S. Armbrust, John Baker, Arne Ballantine, Roger W. Cheek, Doreen D. DiMilia +1 more | 2006-08-22 |