Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8634949 | Manufacturing management using tool operating data | Brian C. Barker, Richard L. Kleinhenz, Gary R. Moore, Mark L. Reath, Justin W. Wong +1 more | 2014-01-21 |
| 7864502 | In situ monitoring of wafer charge distribution in plasma processing | Kevin Boyd, James A Gallo, Mark L. Reath, Barbara L Shiffler, Justin W. Wong | 2011-01-04 |