Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7864502 | In situ monitoring of wafer charge distribution in plasma processing | Kevin Boyd, Edward P. Higgins, Mark L. Reath, Barbara L Shiffler, Justin W. Wong | 2011-01-04 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7864502 | In situ monitoring of wafer charge distribution in plasma processing | Kevin Boyd, Edward P. Higgins, Mark L. Reath, Barbara L Shiffler, Justin W. Wong | 2011-01-04 |