| 8502144 |
Tool-to-tool matching control method and its system for scanning electron microscope |
Chie Shishido, Hiroki Kawada, Tatsuya Maeda |
2013-08-06 |
| 8207512 |
Charged particle beam apparatus and methods for capturing images using the same |
Chie Shishido, Mitsugu Sato, Hiroki Kawada, Tatsuya Maeda |
2012-06-26 |
| 8022356 |
Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope |
Chie Shishido, Maki Tanaka, Hiroki Kawada |
2011-09-20 |
| 8003940 |
Tool-to-tool matching control method and its system for scanning electron microscope |
Chie Shishido, Hiroki Kawada, Tatsuya Maeda |
2011-08-23 |
| 7807980 |
Charged particle beam apparatus and methods for capturing images using the same |
Chie Shishido, Mitsugu Sato, Hiroki Kawada, Tatsuya Maeda |
2010-10-05 |
| 7605364 |
Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope |
Chie Shishido, Maki Tanaka, Hiroki Kawada |
2009-10-20 |
| 7476857 |
Tool-to-tool matching control method and its system for scanning electron microscope |
Chie Shishido, Hiroki Kawada, Tatsuya Maeda |
2009-01-13 |
| 7408154 |
Scanning electron microscope, method for measuring a dimension of a pattern using the same, and apparatus for correcting difference between scanning electron microscopes |
Chie Shishido, Hiroki Kawada, Tatsuya Maeda |
2008-08-05 |
| 7408155 |
Measuring method and its apparatus |
Hiroki Kawada, Ryo Nakagaki, Chie Shishido |
2008-08-05 |
| 7399964 |
Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system |
Chie Shishido, Ryo Nakagaki, Hiroki Kawada |
2008-07-15 |
| 7164127 |
Scanning electron microscope and a method for evaluating accuracy of repeated measurement using the same |
Ryo Nakagaki, Hiroki Kawada, Chie Shishido |
2007-01-16 |