Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10385457 | Raw material gas supply apparatus, raw material gas supply method and storage medium | Hironori Yagi | 2019-08-20 |
| 10047436 | Raw material supply method, raw material supply apparatus, and storage medium | — | 2018-08-14 |
| 9938620 | Gas supply mechanism, gas supplying method, film forming apparatus and film forming method using the same | Hajime Yamanaka, Yasushi Aiba, Takanobu HOTTA | 2018-04-10 |
| 9725808 | Raw material gas supply apparatus | — | 2017-08-08 |
| 9002674 | Temperature measurement apparatus, method of measuring temperature profile, recording medium and heat treatment apparatus | Hitoshi Kikuchi | 2015-04-07 |
| 8992079 | Temperature measurement apparatus, method of estimating temperature profile, recording medium and heat treatment apparatus | Hitoshi Kikuchi, Masato Koakutsu | 2015-03-31 |
| 6873001 | Reduced size plate layer improves misalignments for CUB DRAM | Toshiyuki Nagata, Hiroyuki Yoshida, Atsushi Satoh | 2005-03-29 |
| 6580112 | Method for fabricating an open can-type stacked capacitor on an uneven surface | Yoichi Miyai, Katsushi Boku, Toshiyuki Nagata | 2003-06-17 |
| 6291293 | Method for fabricating an open can-type stacked capacitor on an uneven surface | Yoichi Miyai, Katsushi Boku, Toshiyuki Nagata | 2001-09-18 |
| 6204118 | Method for fabrication an open can-type stacked capacitor on local topology | Yoichi Miyai, Katsushi Boku | 2001-03-20 |
| 5734184 | DRAM COB bit line and moat arrangement | Katsuyoshi Andoh, Yoichi Miyai, Katsushi Boku | 1998-03-31 |
| 5052886 | Semiconductor wafer orientation device | — | 1991-10-01 |
| 4960298 | Semiconductor wafer pick-up device | — | 1990-10-02 |