| 12111110 |
Heat exchanger with multistaged cooling |
— |
2024-10-08 |
| 12094740 |
Automated dry-in dry-out dual side polishing of silicon substrates with integrated spin rinse dry and metrology |
Mahadev Joshi, Joseph Antony Jonathan, Jamie Stuart Leighton |
2024-09-17 |
| 11551942 |
Methods and apparatus for cleaning a substrate after processing |
Kyle M. Hanson, Mahadev Joshi, Arvind Thiyagarajan, Jon C. Farr |
2023-01-10 |
| 11306971 |
Heat exchanger with multistaged cooling |
— |
2022-04-19 |
| 11221182 |
Apparatus with multistaged cooling |
Arul Vasanth Subramanian |
2022-01-11 |
| 10781518 |
Gas cooled electrostatic chuck (ESC) having a gas channel formed therein and coupled to a gas box on both ends of the gas channel |
Brian T. West, Soundarrajan JEMBULINGAM |
2020-09-22 |
| 10052739 |
Carrier head with composite plastic portions |
Kiran Giriyapura |
2018-08-21 |
| 9767990 |
Apparatus for treating a gas in a conduit |
Jibing Zeng, Brian T. West, Rongping Wang |
2017-09-19 |
| 9378928 |
Apparatus for treating a gas in a conduit |
Jibing Zeng, Brian T. West, Rongping Wang |
2016-06-28 |
| 9218996 |
Substrate position aligner |
— |
2015-12-22 |
