Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272558 | Selective and isotropic etch of silicon over silicon-germanium alloys and dielectrics; via new chemistry and surface modification | Jonathan Hollin, Subhadeep Kal, Pingshan Luan, Hamed Hajibabaeinajafabadi, Yu-Hao Tsai +1 more | 2025-04-08 |
| 11715643 | Gas phase etch with controllable etch selectivity of metals | Subhadeep Kal, Daisuke Ito, Yusuke Muraki, Aelan Mosden | 2023-08-01 |
| 11189499 | Atomic layer etch (ALE) of tungsten or other metal layers | Yu-Hao Tsai, Du Zhang, Mingmei Wang, Aelan Mosden | 2021-11-30 |