Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332568 | Metal oxide resists for EUV patterning and methods for developing the same | Akiteru Ko | 2025-06-17 |
| 12287578 | Cyclic method for reactive development of photoresists | Akiteru Ko, Yu-Hao Tsai, Sergey Voronin | 2025-04-29 |
| 12272558 | Selective and isotropic etch of silicon over silicon-germanium alloys and dielectrics; via new chemistry and surface modification | Matthew Flaugh, Jonathan Hollin, Subhadeep Kal, Pingshan Luan, Yu-Hao Tsai +1 more | 2025-04-08 |
| 12002683 | Lateral etching of silicon | Pingshan Luan, Aelan Mosden, Sergey Voronin | 2024-06-04 |