Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9607849 | Pattern-forming method and resist underlayer film-forming composition | Kazuhiko Koumura, Shinya Minegishi, Takashi Mori, Yoshio Takimoto, Shinya Nakafuji +1 more | 2017-03-28 |
| 9170492 | Silicon-containing film-forming composition, silicon-containing film, and pattern forming method | Tomoharu Kawazu, Masato Tanaka, Takashi Mori, Kazunori Takanashi | 2015-10-27 |
| 9126231 | Insulation pattern-forming method and insulation pattern-forming material | Satoshi Dei, Hayato Namai, Koichi Hasegawa | 2015-09-08 |
| 9046769 | Pattern-forming method, and composition for forming resist underlayer film | Yushi Matsumura, Shinya Minegishi, Satoru Murakami, Yusuke Anno, Shinya Nakafuji +1 more | 2015-06-02 |
| 9029069 | Resist underlayer film-forming composition and method for forming pattern | Shin-ya Minegishi, Yushi Matsumura, Shinya Nakafuji, Kazuhiko Komura, Takanori Nakano +2 more | 2015-05-12 |
| 8871432 | Pattern-forming method, resist underlayer film, and composition for forming resist underlayer film | Shin-ya Minegishi, Satoru Murakami, Yushi Matsumura, Kazuhiko Komura, Yoshio Takimoto +1 more | 2014-10-28 |
| 8859185 | Resist underlayer film-forming composition | Shin-ya Minegishi, Yushi Matsumura, Shinya Nakafuji, Kazuhiko Komura, Takanori Nakano +2 more | 2014-10-14 |
| 8859191 | Pattern-forming method, and composition for forming resist underlayer film | Yushi Matsumura, Shinya Minegishi, Satoru Murakami, Yusuke Anno, Shinya Nakafuji +1 more | 2014-10-14 |
| 8513133 | Composition for forming resist underlayer film and method for forming pattern | Shin-ya Minegishi, Yushi Matsumura, Shinya Nakafuji, Kazuhiko Komura, Takanori Nakano +2 more | 2013-08-20 |