Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11004675 | Substrate cleaning composition, substrate treating method, and substrate treating apparatus | Hae-Won Choi, Ki-Moon Kang, Kihoon Choi, Anton Koriakin, Chan Young Heo +3 more | 2021-05-11 |
| 8889563 | Method and apparatus for etching the silicon oxide layer of a semiconductor substrate | — | 2014-11-18 |
| 8790470 | Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods | Hyo-San Lee, Chang-Ki Hong, Kun-Tack Lee, Woo-Gwan Shim, Jeong-Nam Han +4 more | 2014-07-29 |
| 8585917 | Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods | Hyo-San Lee, Chang-Ki Hong, Kun-Tack Lee, Woo-Gwan Shim, Jeong-Nam Han +4 more | 2013-11-19 |
| 8084367 | Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods | Hyo-San Lee, Chang-Ki Hong, Kun-Tack Lee, Woo-Gwan Shim, Jeong-Nam Han +4 more | 2011-12-27 |
| 7808629 | Methods, assemblies and systems for inspecting a photomask | Do-Young Kim | 2010-10-05 |