Issued Patents All Time
Showing 1–25 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10401744 | Calibration method, measurement apparatus, exposure apparatus, and method of manufacturing article | Yoshinori Ohsaki, Osamu Morimoto, Takahiro Matsumoto | 2019-09-03 |
| 9257262 | Lithography apparatus, lithography method, and method of manufacturing article | Hideki Ina | 2016-02-09 |
| 8922774 | Method of manufacturing device, and substrate | Shigeki Ogawa, Hideki Ina | 2014-12-30 |
| 8845317 | Alignment method, imprint method, alignment apparatus, and position measurement method | Nobuhito Suehira, Junichi Seki, Hideki Ina | 2014-09-30 |
| 8618515 | Lithography apparatus and device manufacturing method | — | 2013-12-31 |
| 8338805 | Reticle manufacturing method, surface shape measuring apparatus and signal processor | — | 2012-12-25 |
| 8089612 | Position detection apparatus, position detection method, exposure apparatus, and device fabrication method | Takahiro Matsumoto, Satoru Oishi | 2012-01-03 |
| 7952725 | Surface shape measurement apparatus and exposure apparatus | Takahiro Matsumoto, Satoru Oishi, Hideki Ina | 2011-05-31 |
| 7884935 | Pattern transfer apparatus, imprint apparatus, and pattern transfer method | Nobuhito Suehira, Junichi Seki, Hideki Ina | 2011-02-08 |
| 7771905 | Method and program for calculating exposure dose and focus position in exposure apparatus, and device manufacturing method | Hideki Ina, Koji Mikami, Yoshiaki Sugimura, Hiroto Yoshii, Tomoyuki Miyashita | 2010-08-10 |
| 7670729 | Measurement method and apparatus, exposure apparatus, and device fabrication method | Atsushi Takagi, Hideki Ina, Hiroshi Morohoshi | 2010-03-02 |
| 7586582 | Exposure apparatus | Hideki Ina, Gaku Takahashi, Yoshinori Miwa | 2009-09-08 |
| 7531821 | Imprint apparatus and imprint method including dual movable image pick-up device | Nobuhito Suehira, Junichi Seki, Hideki Ina | 2009-05-12 |
| 7435984 | Imaging optical system and exposure apparatus | Gaku Takahashi, Hideki Ina, Yoshinori Miwa | 2008-10-14 |
| 7396620 | Exposure method and exposure management system | — | 2008-07-08 |
| 7385700 | Management system, apparatus, and method, exposure apparatus, and control method therefor | Takahiro Matsumoto, Hideki Ina, Takehiko Suzuki, Satoru Oishi | 2008-06-10 |
| 7373213 | Management system and apparatus, method therefor, and device manufacturing method | Satoru Oishi, Hideki Ina, Takehiko Suzuki, Takahiro Matsumoto | 2008-05-13 |
| 7271882 | Shape measuring apparatus, shape measuring method, and aligning method | Hideki Ina, Takahiro Matsumoto | 2007-09-18 |
| 7247868 | Position detection method and apparatus | Takehiko Suzuki, Hideki Ina, Satoru Oishi | 2007-07-24 |
| 7173716 | Alignment apparatus, exposure apparatus using the same, and method of manufacturing devices | Satoru Oishi, Hideki Ina, Takehiko Suzuki | 2007-02-06 |
| 7148973 | Position detecting method and apparatus, exposure apparatus and device manufacturing method | Hideki Ina, Takehiko Suzuki, Satoru Oishi | 2006-12-12 |
| 7123414 | Method for producing library | Hideki Ina | 2006-10-17 |
| 7110116 | Alignment apparatus, exposure apparatus using same, and method of manufacturing devices | Satoru Oishi, Hideki Ina, Takehiko Suzuki | 2006-09-19 |
| 7075618 | Apparatus control system, apparatus control method, semiconductor exposure apparatus, semiconductor exposure apparatus control method and semiconductor device manufacturing method | Hideki Ina, Takehiko Suzuki, Takahiro Matsumoto, Satoru Oishi | 2006-07-11 |
| 7069104 | Management system, management apparatus, management method, and device manufacturing method | Takehiko Suzuki, Hideki Ina, Takahiro Matsumoto, Satoru Oishi | 2006-06-27 |