Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176184 | Synchronization of bias supplies | Denis Shaw, Gideon Van Zyl | 2024-12-24 |
| 12159767 | Spatial control of plasma processing environments | Daniel Carter, Denis Shaw, Victor Brouk | 2024-12-03 |
| 12142460 | Control of plasma sheath with bias supplies | Denis Shaw, Daniel Carter | 2024-11-12 |
| 11842884 | Spatial monitoring and control of plasma processing environments | Denis Shaw, Daniel Carter | 2023-12-12 |
| 11610761 | Synchronization between an excitation source and a substrate bias supply | Denis Shaw, Daniel Carter | 2023-03-21 |
| 11437221 | Spatial monitoring and control of plasma processing environments | Daniel Carter, Denis Shaw, Victor Brouk | 2022-09-06 |
| 11282677 | Spatial monitoring and control of plasma processing environments | Denis Shaw, Daniel Carter | 2022-03-22 |
| 11264209 | Application of modulating supplies in a plasma processing system | Gideon Van Zyl, Denis Shaw | 2022-03-01 |
| 10896807 | Synchronization between an excitation source and a substrate bias supply | Denis Shaw, Daniel Carter | 2021-01-19 |
| 10811229 | Synchronization with a bias supply in a plasma processing system | Gideon Van Zyl, Denis Shaw | 2020-10-20 |
| 10811227 | Application of modulating supplies in a plasma processing system | Gideon Van Zyl, Denis Shaw | 2020-10-20 |
| 10811228 | Control of plasma processing systems that include plasma modulating supplies | Gideon Van Zyl, Denis Shaw | 2020-10-20 |
| 10752987 | System architecture for combined static and pass-by processing | Patrick Leahey, Eric C. Lawson, Charles Liu, Terry Bluck, Robert Ruck +1 more | 2020-08-25 |
| 10707055 | Spatial and temporal control of ion bias voltage for plasma processing | Denis Shaw, Daniel Carter | 2020-07-07 |
| 10607813 | Synchronized pulsing of plasma processing source and substrate bias | Denis Shaw, Daniel Carter | 2020-03-31 |
| 9914994 | System architecture for combined static and pass-by processing | Patrick Leahey, Eric C. Lawson, Charles Liu, Terry Bluck, Robert Ruck +1 more | 2018-03-13 |
| 9524896 | Apparatus and methods for transporting and processing substrates | Terry Bluck, Michael Barnes, Christopher T. Lane | 2016-12-20 |
| 9111979 | System and method for real time positioning of a substrate in a vacuum processing system | — | 2015-08-18 |
| 8998553 | High throughput load lock for solar wafers | Vinay Shah, William Eugene Runstadler, Jr., Terry Bluck, Richard Cooke | 2015-04-07 |
| 8349196 | System and method for commercial fabrication of patterned media | Michael Barnes, Terry Bluck, Ren Xu, Charles Liu, Ralph Kerns | 2013-01-08 |
| 8303764 | Apparatus and methods for transporting and processing substrates | Terry Bluck, Michael Barnes, Christopher T. Lane | 2012-11-06 |
| 8293066 | Apparatus and methods for transporting and processing substrates | Terry Bluck, Michael Barnes, Christopher T. Lane | 2012-10-23 |
| 8087380 | Evaporative system for solar cell fabrication | Terry Bluck, Michael Barnes | 2012-01-03 |
| 7901539 | Apparatus and methods for transporting and processing substrates | Terry Bluck, Michael Barnes, Christopher T. Lane | 2011-03-08 |
| 7479686 | Backside imaging through a doped layer | Kenneth Costello, David Ward Brown, Yun H. Chung, Patricia Gober, Edward Yin | 2009-01-20 |